13. 12. 2019  9:19 Lucia
Akademický informačný systém

Sylabus predmetu VATT01_6I - Vacuum Engineering and Technology (MTF - WS 2019/2020)


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University: Slovak University of Technology in Bratislava
Faculty: Faculty of Materials Science and Technology in Trnava
Course unit code: VATT01_6I
Course unit title: Vacuum Engineering and Technology
Mode of completion and Number of ECTS credits: Exam (5 credits)
Course contents:
1.Basic terms and concepts in vacuum technology (allowance 2/2)
 
a.The History of Vacuum Science and Vacuum Technology
b.Gas Laws and Kinetic Theory of Gasses
c.Real Gasses and Vacuum definition

2.Vacuum basic concepts (allowance 2/2)
 
a.Evaporation and condensation
b.The concept of vapour pressure, mixtures of ideal gases
c.Physico-chemical phenomena in vacuum technology

3.Vacuum Generation, Positive Displacement Pumps (allowance 2/2)
 
a.Intensity and velocity of pumping
b.Positive displacement vacuum pumps, multiple vane rotary pumps
c.Oscillation displacement vacuum pumps

4.Kinetic vacuum pumps (allowance 2/2)
 
a.Types of gas flow, definitions and characterizing
b.Ejector pumps
c.Diffusion pumps, molecular drag and turbomolecular pumps

5.Entrapment vacuum pumps (allowance 2/2)
 
a.Sorption pump, zeolites
b.Getter and sublimation pump
c.Sputter ion pump

6.Cryotechnology and Cryopumps I (allowance 2/2)
 
a.Absolute zero and temperature scales
b.Methods of refrigeration
c.Characteristics of cryopumps

7.Cryotechnology and Cryopumps II (allowance 2/2)
 
a.Dewars, materials for cryotechnology
b.Superconductivity, SQUID
c.Examples of applications for UHV systems

8.Pressure measuring in vacuum technology I (allowance 2/2)
 
a.Definition of terms for vacuum measurement
b.Principle and classification of mechanical vacuum gauges
c.Bourdon Tube and diaphragm (membrane) vacuum gauges

9.Pressure measuring in vacuum technology II (allowance 2/2)
 
a.Vacuum gauges with gas-dependent pressure reading
b.Thermal Conductivity Vacuum Gauges
c.Ionization Gauges

10.Characterization of vacuum systems (allowance 2/2)
 
a.Vacuum components and seals

11.Leaks and their detection (allowance 2/2)
 
a.Types of leaks, leak detection methods
b.Leak detection techniques using helium leak detectors
c.Halogen leak detectors

12.Application of vacuum technology for coating techniques I (allowance 2/2)
 
a.Physical vapor deposition
b.Evaporation sources and materials
c.Sputtering

13.Application of vacuum technology for coating techniques II (allowance 2/2)
 
a.Chemical vapor deposition
b.Types and characterization of CVD
c.Ion implantation


Last modification made by Bc. Jana Rohaľová on 12/20/2018.

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