Feb 25, 2020   10:04 p.m. Frederik
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Ing. arch. Ing. Ľubomír Vančo, PhD.
Identification number: 29125
University e-mail: lubomir.vanco [at] stuba.sk
 
Výskumný pracovník s VŠ vzdelaním - STU Centre for Nanodiagnostics (UVP OUP REK)

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The following list contains all information available to the publication.

MARTON, M. -- RITOMSKÝ, M. -- ŘEHÁČEK, V. -- MICHNIAK, P. -- BEHÚL, M. -- NOVÁK, P. -- VANČO, Ľ. -- VOJS, M. Comparison of Al and Cu masks used for patterning boron-doped diamonds in oxygen plasma. Journal of micromechanics and microengineering, 29. p. 2019.

Original name: Comparison of Al and Cu masks used for patterning boron-doped diamonds in oxygen plasma
Name in Slovak:
Written by (author): Ing. Marián Marton, PhD. (30%)
Ing. Mário Ritomský (10%)
RNDr. Vlastimil Řeháček, PhD. (10%)
Ing. Pavol Michniak, PhD. (10%)
Ing. Miroslav Behúl, PhD. (10%)
Ing. Patrik Novák, PhD. (10%)
Ing. arch. Ing. Ľubomír Vančo, PhD. (10%)
Ing. Marian Vojs, PhD. (10%)
Department: Institute of Nuclear and Physical Engineering
Institute of Electronics and Phototonics
STU Centre for Nanodiagnostics
Kind of publication: articles in magazines
Periodical: Journal of micromechanics and microengineering
Volume no. (year): 29
Starting page: 2019
Up to page: 2019
Number of pages: 1
Original language: English
Publication category: ADC Vedecké práce v zahraničných karentovaných časopisoch
Scientific field:
Key words: slovak: micro-patterning, boron doped diamond, plasma etching
Year of submission: 2019
Year of transmission: 2019
 
Entry made by: Ing. Marián Marton, PhD.
Last change: 11/30/2019 22:21 (Data import from library)


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Journal of micromechanics and microengineering. 2019.

Original name: Journal of micromechanics and microengineering
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Year of publication: 2019
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Year of submission: 2019
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Last change: 11/30/2019 22:20 (Data import from library)