May 22, 2019   0:36 a.m. Júlia, Juliana
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High energy heavy ion-beam annealing of ion implantation synthesized silicon carbide

Supervisor: Ing. Jozef Dobrovodský, CSc.


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Project description:SiC is a promising material for a wide range of applications from semiconductor industry to e.g. in fuel elements of next generation nuclear power plants' reactors. The most recent method for SiC synthesis is based on carbon implantation into silicon substrate followed by High Energy Heavy-Ion-Beam Annealing (HE HIBA) is currently under development. Advantages of HE HIBA annealing are significantly lower temperature requirements, possibility of localized synthesis and short time of treatment, among other things. Synthesized silicon carbide will be analyzed and characterized by Rutherford backscattering spectrometry (RBS), Resonant Nuclear Reaction Analysis (R-NRA), X-ray diffraction (XRD) and transmission electron microscopy (TEM). Particularly the new experimental facility at MTF STU Trnava equipped with a 500 kV ion implanter and 6 MV tandem accelerator will be utilized. Relation between the main parameters of synthesis processes and of the resulting SiC layers will be studied.
Kind of project:VEGA ()
Department:Advanced Technologies Research Institute (MTF)
Project identification:1/0219/16
Project status:Successfully completed
Project start date :01. 01. 2016
Project close date:31. 12. 2018
Number of workers in the project:10
Number of official workers in the project:6

Official project workers

The following table shows the researcher workers who have been assigned official roles in a project.

OfficerOfficial roles
Ing. Jozef Dobrovodský, CSc.zodpovedný riešiteľ
Bc. Alena Michálikováadministratíva
Ing. Matúš Beňo, PhD.spoluriešiteľ
RNDr. Ing. Vladimír Kolesár, PhD.spoluriešiteľ
Ing. Anna Závacká, PhD.spoluriešiteľ
Ing. Pavol Noga, PhD.spoluriešiteľ