Mar 26, 2019   4:55 a.m. Emanuel
Academic information system

Projects


Gas sensing microsystem on GaAs micromechanical structures

Supervisor: prof. Ing. Ivan Hotový, DrSc.


Basic information   Workers      


This page shows details on the project. The primary projects are displayed together with a list of sub-projects.

Project description:The project proposal combines formerly diverse research themes like bulk and surface GaAs micromachining, thin film processing of gas sensing materials, monolithic GaAs integrated circuits.
Kind of project:VTP ()
Department:Department of microelectronics (FEEIT)
Project identification:AV/1115/2004
Project status:Successfully completed
Project start date :01. 07. 2004
Project close date:01. 01. 2007
Number of workers in the project:1
Number of official workers in the project:0