May 23, 2019   7:08 p.m. Želmíra
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Gas sensing microsystem on GaAs micromechanical structures

Supervisor: prof. Ing. Ivan Hotový, DrSc.

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Project description:The project proposal combines formerly diverse research themes like bulk and surface GaAs micromachining, thin film processing of gas sensing materials, monolithic GaAs integrated circuits.
Kind of project:VTP ()
Department:Department of microelectronics (FEEIT)
Project identification:AV/1115/2004
Project status:Successfully completed
Project start date :01. 07. 2004
Project close date:01. 01. 2007
Number of workers in the project:1
Number of official workers in the project:0