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Monolithic intergrated gas sensing microsystem based on GaAs microstructures.

Supervisor: prof. Ing. Ivan Hotový, DrSc.


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Project description:The main objective of our project is to research and develop new materials and technologies for the fabrication of miniature, intelligent, low power consumption gas microsensors to gas detection. The project proposes basic research in the fields as novel gas sensitive materials and sophisticated GaAs based micro-electro-thermo-mechanical systems. We suppose that our activities will be focused on the preparation and investigation of NiO thin films as a promising sensor material and thermally isolated Pt microheater on GaAs-based micromechanical structure with low thermal conductivity. Novel etching process will be developed and optimized using an advanced deep dry plasma etching for GaAs high selectivity micromachining of gas microsensors. These novel technologies together with modelling of mechanical and thermal properties will be the basis for a new generation of monolithic integrated gas sensing microsystems.
Kind of project:APVV ()
Department:Department of microelectronics (FEEIT)
Project identification:APVT-20-021004
Project status:Successfully completed
Project start date :01. 01. 2005
Project close date:31. 12. 2007
Number of workers in the project:1
Number of official workers in the project:0