Oct 23, 2019   5:04 a.m. Alojza
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Nanocrystalline thin film structures for sensorics and microsystem technology.

Supervisor: prof. Ing. Ivan Hotový, DrSc.

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Project description:The main objective of our project is to research and develop new nanocrystalline thin film structures for miniature elements used to the gas detection and the small quantities of heavy metals. The project proposes to realize the basic research in the fields as searching of novel progressive materials based on surface modified metal oxides and of support materials for ultra micrometer electrode arrays. We suppose that our activities will be focused on the preparation and investigation of the surface modified NiO thin films using nanocrystalline Pt particles and the growth and patterning of thermal-conductive and electro-isolated materials as SiC and/or AlN. We will try to combine all these thin films together with submicron electrode system into the sensor structure for gas detection. Our attention will be focused on the patterning of diamond film and its integration into the ultramicron electrode array suitable for the heavy metal determination in the water synthetic solutions using anodic stripping voltammetry.
Kind of project:VEGA ()
Department:Department of microelectronics (FEEIT)
Project identification:1/3095/06
Project status:Successfully completed
Project start date :01. 01. 2006
Project close date:31. 12. 2008
Number of workers in the project:1
Number of official workers in the project:0