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Development and application of diagnostic methods for assessment of semiconductor devices and integrated circuits.

Supervisor: prof. Ing. Alexander Šatka, CSc.

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Project description:The methods of scanning electron microscopy (SEM SE/BSE, EBIC, EDS), scanning probe microscopy (STM, AFM), micro-Raman spectroscopy (uRS), secondary?ion mass spectroscopy (TOF-SIMS), and Auger electron spectroscopy (AES) will be adapted for specific needs related to effective production of silicon power diodes and integrated circuits. Successive building and development of research potential for gathering of scientific knowledge in the field of silicon structures and devices and effective application of acquired knowledge in the education are among the other goals of the project.
Kind of project:VTP ()
Department:Department of microelectronics (FEEIT)
Project identification:4/0022/05
Project status:Successfully completed
Project start date :01. 10. 2005
Project close date:30. 09. 2008
Number of workers in the project:1
Number of official workers in the project:0