Research of growth and doping of D- and DLC layers for electronic applications.Supervisor: doc. Ing. Marian Veselý, CSc.
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|Project description:||The project deals with the research of growth and doping of CVD diamond, DLC (diamond-like carbon), NCD (nanocrystalline diamond) and UNCD (ultra-nanocrystalline diamond) layers in order to obtain wide outline about this problems and to make some prototypes of diamond electronic devices. We use HFCVD (Hot filament vapor depozition) and MWCVD (Microwave power CVD) methodfor growth and doping of diamond layers, analyze them by Raman spektroscopy at our faculty by Scanning electron microscopy äSEM) in co-operation with International Laser Centre in Bratislava.|
|Kind of project:||APVV ()|
|Department:||Department of microelectronics (FEEIT)|
|Project status:||Successfully completed|
|Project start date :||13. 11. 2006|
|Project close date:||30. 05. 2010|
|Number of workers in the project:||1|
|Number of official workers in the project:||0|