Metal-insulator-metal structures for nanoscale DRAM memoriesSupervisor: doc. Ing. Ladislav Harmatha, PhD.
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|Project description:||Project is focused on the prepaartion and analysis of properties of Structures metal-insulator-metal for nanoscale dynamic random acces memories. Particular attention will be devoted to the achievement of high density of stored charge and to the analysis of mechanism of leakage currents in dielectric films and on the interfaces metal-dielectric.|
|Kind of project:||APVV ()|
|Department:||Department of microelectronics (FEEIT)|
|Project status:||Successfully completed|
|Project start date :||01. 09. 2008|
|Project close date:||30. 06. 2011|
|Number of workers in the project:||3|
|Number of official workers in the project:||0|