Advanced MEMS chemical sensors for extreme conditionsSupervisor: prof. Ing. Ivan Hotový, DrSc.
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|Project description:||Much efforts of the project research team will be made to introduce the new designed MEMS sensoric device in all its complexity and multidisciplinary basis. Therefore, besides the modelling and fabrication methods developed, much attention will be devoted to new methodology of sensing and detection and new non-conventional methods to analyze the basic thermo-mechanical properties of the MEMS device in both stationary dynamic process conditions.|
|Kind of project:||APVV ()|
|Department:||Department of microelectronics (FEEIT)|
|Project status:||Successfully completed|
|Project start date :||01. 06. 2008|
|Project close date:||31. 12. 2010|
|Number of workers in the project:||3|
|Number of official workers in the project:||0|