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Research and development of special methods for characterization and diagnostic of advanced semiconductor micro/nanostructures and devices

Supervisor: prof. Ing. Alexander Šatka, CSc.

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Project description:Development of special methods for visualization and characterization of semiconductor nanoparticles, nanostructured surfaces, micro/nanostructures and integrated circuits (ICs) using scanning electron microscopy (SEM), micro-Raman spectroscopy (μRS), micro-photoluminescence (μPL) and scanning probe microscopy (SPM), with the aim to receive new knowledge for design optimization and technology improvement of advanced structures and devices. Development of methods for measurement of local electrical quantities and diagnostics of semiconductor devices using micropositioning probes and SEM/EBIC and AFM/EFM methods. Gain of knowledge about space distribution and behavior of inhomogeneities and defects in semiconductor structures, resulting in degradation of semiconductor devices. Receiving of knowledge about noise sources in advanced semiconductor devices having various inorganic and organic materials used in their active region. Characterization and study of dynamic behavior of high-speed semiconductor devices.
Kind of project:VEGA ()
Department:Department of microelectronics (FEEIT)
Project identification:1/0716/09
Project status:Successfully completed
Project start date :01. 01. 2009
Project close date:31. 12. 2012
Number of workers in the project:14
Number of official workers in the project:0