Aug 22, 2019   6:35 a.m. Tichomír
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Nanostructures thin film systems for MEMS sensor applications

Supervisor: prof. Ing. Ivan Hotový, DrSc.


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Project description:The main objective of our project is to research and develop new nanostructured thin film systems for MEMS sensor elements used to gas detection. The project proposes to realize the basic research in the fields as searching of novel progressive materials based on surface modified of mixing metal semiconducting oxides and of new support materials for ultramicroelectrode arrays for determination of the trace heavy metals in water. We suppose that our activities will be focused on the preparation and investigation of In2O3, TiO2, NiO thin films and their combinations as mixing oxides. We will try to combine all these nanostructured films together with submicron electrode system into MEMS sensor structure for gas detection. Our attention will be focused on the using of various diamond-like carbon films as a support of bismuth film ultramicroelectrode array suitable for the heavy metal determination in the water solutions using anodic stripping voltammetry (ASV) and potentiometric stripping analysis (PSA).
Kind of project:VEGA ()
Department:Department of microelectronics (FEEIT)
Project identification:1/0553/09
Project status:Successfully completed
Project start date :01. 01. 2009
Project close date:31. 12. 2011
Number of workers in the project:2
Number of official workers in the project:0