Micromachined metal oxide gas microsensorsSupervisor: prof. Ing. Ivan Hotový, DrSc.
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|Project description:||Design and fabrication the set of suitable photolithographic masks for microsystems and testing structures for optimalization of thin film properties. Design and development of Pt microheater with low power consumption and improved thermal stability. To obtain new scientific knowledge about the NiO thin films preparations and properties surface modified by Pt nanocrystalline particles as gas sensing materials.|
|Kind of project:||Bilaterálna spolupráca - SR - Taliansko ()|
|Department:||Department of microelectronics (FEEIT)|
|Project status:||Successfully completed|
|Project start date :||01. 01. 2003|
|Project close date:||31. 12. 2005|
|Number of workers in the project:||2|
|Number of official workers in the project:||0|