NiO baed thin films with Pt surface modification for gas detectionSupervisor: prof. Ing. Ivan Hotový, DrSc.
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|Project description:||The main objective of the project is to perform basic research and to develop novel gas sensitive materials based on semiconducting NiO thin films with surface modification adapted onto a GaAs micromechanical structure. The important aspect in the proposed collaboration is in the area of material analysis where techniques such as SIMS (low-energy and fine-focus type) and AFM will provide vital feedback to support the growth technology and processing. These analytical techniques will yield detailed surface composition and dopant distributions as a function of the layer growth and treatment and will ultimately be correlated to the sensors gas detection properties.|
|Kind of project:||Bilaterálna spolupráca - SR - Veľká Británia ()|
|Department:||Department of microelectronics (FEEIT)|
|Project status:||Successfully completed|
|Project start date :||01. 02. 2004|
|Project close date:||15. 12. 2006|
|Number of workers in the project:||2|
|Number of official workers in the project:||0|