Oct 20, 2019   8:55 a.m. Vendelín
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NiO baed thin films with Pt surface modification for gas detection

Supervisor: prof. Ing. Ivan Hotový, DrSc.

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Project description:The main objective of the project is to perform basic research and to develop novel gas sensitive materials based on semiconducting NiO thin films with surface modification adapted onto a GaAs micromechanical structure. The important aspect in the proposed collaboration is in the area of material analysis where techniques such as SIMS (low-energy and fine-focus type) and AFM will provide vital feedback to support the growth technology and processing. These analytical techniques will yield detailed surface composition and dopant distributions as a function of the layer growth and treatment and will ultimately be correlated to the sensors gas detection properties.
Kind of project:Bilaterálna spolupráca - SR - Veľká Británia ()
Department:Department of microelectronics (FEEIT)
Project identification:A/S
Project status:Successfully completed
Project start date :01. 02. 2004
Project close date:15. 12. 2006
Number of workers in the project:2
Number of official workers in the project:0