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Paralene thin Film Preparation and Aplication in Electronic Devices.

Supervisor: prof. Ing. Jaroslav Kováč, CSc.


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Project description:Thin films of parylene (poly-p-xylylene) represent a new type of material which can be used as coating material for reducing oxidation and packing problems in organic electronic and optoelectronic devices. The experiments of the project are focused on the preparation and characterisation of thin films of Parylene C. Parylene C shows excellent coating uniformity due to a good controllable and slow film deposition process. The deposition process is performed in a vacuum tube with three different temperature zones.
Kind of project:MVTS ()
Department:Department of microelectronics (FEEIT)
Project identification:49s5
Project status:Successfully completed
Project start date :01. 01. 2005
Project close date:31. 12. 2006
Number of workers in the project:2
Number of official workers in the project:0