Novel surface modified thin films for gas microsensors on GaAs.Supervisor: prof. Ing. Ivan Hotový, DrSc.
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|Project description:||Research in the field of gas sensors leads to the development of integrated sensors and mi-crosystems fabricated using integrated semiconductor technology. The deposition of the sensing layer is the most crucial part in the preparation of sophisticated gas microsensors. Our aim is to research novel and inexpensive semiconducting NiO-based films in doped form adapted onto GaAs micromechanical structures for environmental monitoring.|
|Kind of project:||Program des Projektbezogenen Personeustauschs /PPP/ ()|
|Department:||Department of microelectronics (FEEIT)|
|Project status:||Successfully completed|
|Project start date :||01. 01. 2005|
|Project close date:||31. 12. 2006|
|Number of workers in the project:||2|
|Number of official workers in the project:||0|