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Doping and surface modification of zinc-oxide thin films

Supervisor: prof. RNDr. Vladimír Tvarožek, CSc.


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Project description:Research of sputtered transparent conductive oxide (TCO) thin films based on ZnO and focused particularly on: (i) doping of TCO thin films by RF sputtering and ion implantation, (ii) modification of their crystallic structure and surface topology with the aim to apply them in sensoric interfaces, (iii) obtaining a new knowledge in the characterization of TCO thin films and nanostructures by physical analytical methods. Doped zinc oxide (ZnO:X) as TCO material is under intensive development because its high abundance, low price and enviromental harmless. Its unique properties depend on technology of preparation, and particularly on doping:range of conductivity from metallic to insulating (including n-type and p-type conductivity), high transparency, direct wide-band, large exciton binding energy, piezoelectricity, room-temperature ferromagnetism, huge magneto-optic and chemical - sensing effects as well as its great ability to form variety of nanostructures. It gives the possibility to use the ZnO in a broad spectrum of applications:in microelectronics, optoelectronics and nanotechnologies.
Kind of project:Bilaterálna spolupráca - SR - Srbsko ()
Department:Department of microelectronics (FEEIT)
Project identification:SK-SRB-0012-09
Project status:Successfully completed
Project start date :01. 03. 2010
Project close date:31. 12. 2011
Number of workers in the project:2
Number of official workers in the project:0