Nanostructured mixing metal oxides for MEMS gas sensorsSupervisor: prof. Ing. Ivan Hotový, DrSc.
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|Project description:||The main objective of our project is to research and develop new nanostructured mixing metal oxides for MEMS sensor elements used to gas detection. The project proposes to realize the basic research in the fields as searching of novel progressive material s based on surface modified of mixing metal semiconducting oxides. We suppose that our activities will be focused on the preparation and investigation of In203, Ti02 and NiO thin films and their combinations as mixing oxides. We will try to combine these nanostructured films together with submicron electrode system into MEMS sensor structure for gas detection. New quality of microsystem chip will be reached by careful technology development and sophisticated micro architecture design.|
|Kind of project:||Bilaterálna spolupráca - SR - Taliansko ()|
|Department:||Department of microelectronics (FEEIT)|
|Project status:||Successfully completed|
|Project start date :||01. 06. 2009|
|Project close date:||31. 12. 2011|
|Number of workers in the project:||2|
|Number of official workers in the project:||0|